We are pleased to announce that the EpiSoft Control System will be under the management of Dr Eberl MBE Komponenten GmbH (www.mbe-components.com) from December 2020. For all enquiries, please contact: sales@mbe-components.com

EpiMax would like to take the opportunity of thanking all our loyal customers for their help and support during the development of EpiSoft over many years; we feel confident that it has a bright future under new management.

  • Research, Development and Production
  • Flexible software and hardware platform fully user configurable for any physical deposition application (solid- and gas- source MBE, PLD...)
  • Define recipes in terms of growth rates, composition, doping rate, thickness...
  • Precision Data Logging
  • Recipe editing during growth


  • Control, Monitor and Data Log vacuum system performance
  • Graphical data presentation
  • Print and export data

VacTools Data Exchange API

  • Transfer data instantaneously from VacTools to your own software using simple data transfer mechanism

  • Precision HV/UHV pressure measurement
  • PVCuni: 1x UHV gauge
  • PVCduo: 2x UHV gauges
  • Configurable modules to support up to 2 additional gauges (e.g. Pirani, smart gauges...)
  • User-configurable digital I/O Interlock Hub for system safety
  • Multi-step bake-out control (dual zone option)
  • Measurement as pressure or current (for BFM)
  • Analogue output
  • Fast multi-parameter comms interface (compatible with VacTools)
  • Wide range of accessories available (see Vacuum Gauges and PVC Accessories)

Vacuum Gauging and Cabling


PVC and Vacuum System Accessories


  • Bake-out thermocouple assemblies
  • DIN-rail heater/valve power switching assemblies
  • Soldering-free wiring aids for interlocking, power switching....