EpiMax Logo

EpiMax Ltd
office (+44) 1291 671002
fax (+44) 1291 671003

PVCi & PVCiDuo UHV Ion Gauge/Vacuum System Controllers

PVCiDuo Front Panel

PVC Description

      The PVC (Process/Vacuum Control) range of UHV gauge controllers represent a new concept in vacuum management, integrating precision UHV pressure monitoring with a range of on-board vacuum system management functions.
     The PVC instruments run all commercial single and twin filament HV/UHV ion gauge heads, including the EpiMax range, VG, GP, AML, Varian etc.
     PVC's integrate easily with vacuum system control via their 7 trips, 2 interlocks, and user-defined analogue output, providing user-defined control functionality such as pressure and interlock protection of the system, multi-step bake-out, auto pump-down/ion gauge start, timer function (e.g. TSP firing), and pressure sampling during degas for added system/gauge protection.
     Additional functionality is provided via 2 "slots" accommodating optional modules. Installation of Pirani modules provides for backing pressure monitoring (atmosphere to <10-3mB) and auto-pump down/ion gauge power up. As well as EpiMax EMP16 and EMP8 Pirani gauge heads, Thyracont VSP521/522 and VG Pirani gauges are supported. The type K thermocouple module facilitates multiple ramp/soak UHV system bake-out, enabling integrated pressure, time and interlocking with minimal external wiring.
     Manual operation is via an easy to use touch panel menu system; for automated installations, all aspects of the PVCs can be controlled using an efficient MODBUS protocol via the multi-drop RS232 and RS485 interfaces (fitted as standard).

     The functional differences between PVCi and PVCiDuo are: 

 PVCiPVCiDuo
Number of ion gauge heads, independent/simultaneous operation and degas12
Filament typesW & IrIr
Degas Powers1,2,3,6,
12,20,30W
1,2,3,6,
15,30W
Pump Down functionYN
Timer functionYN

Optional PVC Modules

      As indicated above, the PVC controllers have slots for 2 optional "modules". Modules can be supplied pre-installed, or can be fitted by the end user.

      There are 3 modules available at present:

  • "T" module for EpiMax EMP16 & EMP8 Pirani gauge heads - see EM Pirani gauges and Thyracont VSP521/522 Pirani gauge heads
  • "V" module for VG Pirani gauge heads
  • "K" module for Type K thermocouple monitoring. Provides for bake-out support

PVC Specification

      General

Dimensions1U high 19" rack mounting.
Depth 257mm excluding connectors
Weight: PVCi: 6.8kg; PVCiDuo: 7.3kg
Power230/115Vac (+10-15%).
Typical 10VA + dissipated ion gauge power
Display20 character green/blue VFD alpha-numeric
4 brightness levels.
0, 1 or 2 decimal place resolution
EnvironmentalInternal fan-assisted temperature controlled
Operating environment 0-40°C
UnitsUser-defined: mBar, Torr, Pascal

      Ion Gauge

Type supportedSingle/dual filament HV and UHV Ion/Bayard Alpert gauges. 10-13 to 10-2mBar
Gauge ConnectorFilaments & Grid: 6-pin "Qikmate"
Collector: Insulated BNC
Sensitivity0.1 to 99.9 mB-1
Potentials
Normal/Degas
Grid: +190V/+650V
Filament: +40V/0V
Filament driveTungsten (PVCi only): 14V @ 5.5A
Iridium: 7V @ 3.2A
EmissionFixed: 0.1, 0.2, 0.5, 1, 2, 5 & 10mA
Auto-ranging: Pressure dependent with 1 decade hysteresis
User-defined min/max emission current
DegasSoft-start ramped to user-specified value. Rise and hold ramp times 1 to 999 mins
PVCi: 1,2,3,6,12,20 & 30W
PVCiDuo: 1,2,3,6,15 & 30W
Quick Degas1 minute at user-specified power
DigitalA/D 12 bit: 4/8 times oversampled 10/second.
Low pass digital filter 0.1-9.9 seconds.
RIPPA (Rapid Increment Pressure Protection Algorithm) ensure rapid response during pressure bursts.
ProtectionThermal trip
Connector interlock
Filament overcurrent: 3A for Ir, 6A for W
Over/under emission
Over pressure
ElectrometerThermally stabilized logarithmic amplifier
Pressure range <10-12 to 10-2mB at sensitivity of 10mB-1 (gauge dependent).
Gauge lifetimeGauge lifetime monitor

     Trips

Spec4 change-over relay: 1A @ 24Vdc/0.5A @ 125Vac. Max switched power 30W/62.5VA
3 open collector: NPN darlington 250mA @ 20V
[Higher currents with the PVCiRL7 unit]
ConnectorDB25 male (shared with digital inputs)
AssignmentNone, ion gauge(s), Slot A, Slot B, pump-down, bake-out, timer, comms...
Direction> or < trip level
Trip level10-13 to 10+6 absolute
Normal (on/off action), override or inhibit
HysteresisUser-defined from 1x (none) to 99.9x

     Digital Inputs

Spec2 off
Opto-isolated. 3-32Vdc driven (2k2Ω).
AssignmentInhibit of ion gauge(s), pump-down, bake-out, timer...
Remote control of ion gauge/degas...
OperationNormal (on/off action), override or inhibit

     Pirani Gauge Modules

Module Types"E": Suitable for EMP16 & EMP8 Pirani gauge heads and Thyracont VSP521/522 Pirani gauge heads. Constant filament temperature
"V": Suitable for VG Pirani gauge heads
RangeAtmosphere to 10-03mB
Capabilities

User assignable to trips
User assignable interlocking
Auto pump-down
Auto start of ion gauge etc.

     Bake-out Module

Module Type "K" module for type K thermocouple with cold junction compensation
Operating range: 40-400°C (±2°C < 250°C; ±3% > 250°C)
User-defined
Assignments
Control to heaters via assigned trips.
Interlock from user-defined pressure reading, interlock inputs; options: suspend, fail...
Bake-outUp to 6 ramp/soak steps each up to 99.9hours
User-defined hysteresis (1-99°C)

     Analogue Output

Spec12-bit resolution @ 5 times/second
AssignmentIon gauge, Pirani, ion gauge+Pirani...
Auto-corrected for sensitivity and emission current
User optionsLog or linear
Voltage range output
Pressure range output
ConnectorStandard 3.5mm jack socket

     Timer

SpecOn/off timer allowing on/off periods of 6 seconds to 1 day each
ApplicationPump regeneration, TSP firing
DependenciesIon gauge pressure, interlocks...

     Communications - Computer Control

InterfaceMulti-drop RS232 & RS485
ConnectorsRJ45
ProtocolMODBUS. Complete instrument control.
Floating point resolution data transfer.

PVCiDuo rear panel

Rear panel view of PVCiDuo controller

Summary:

  • 1U 19" rack unit
  • Single(PVCi) or dual (PVCiDuo) twin filament, UHV/HV ion gauge head
  • 10-13mB to atmosphere
  • Thoria- or Yttria- Iridium and Tungsten filaments
  • 7 emission ranges or Auto-ranging emission
  • Ramped power degas
  • Pressure measurement during degas
  • RIPPA - rapid response to pressure bursts
  • Precision, stable electrometer
  • Gauge head lifetime
  • 7 output trips
  • 2 input interlocks
  • User-defined analogue output
  • Integrated, interlocked, multi-step bake-out controller
  • Pirani support
  • Auto pump-down
  • Timer function
  • Simple to use manual interface
  • Full control over MODBUS interface over multi-drop RS232/RS485

Applications:

  • All HV and UHV system pressure and interlock monitoring, and process control
  • UHV system bake-out management
  • Automated UHV system management
  • MBE flux monitoring